AP500, Single Stage Compact Regulator for Ultra High Purity
Series AP is an ultra high purity (UHP) regulator for gas delivery in semiconductor and other clean industries. The series is available in low to high flow capacities, with some models offering a tied-diaphragm design. Available options include Hastelloy® internals for corrosion resistance, a tube stub weld fitting connection type, and various surface finishes.
For UHP gas delivery
Flow capacity: standard to 15 slpm; HF (option) to 30 slpm
Body material: 316L SS secondary remelt
Hastelloy® internals available for corrosion resistance