Series AZ is an ultra high purity (UHP)diaphragm valve for gas delivery in semiconductor and other clean industries.  This series is available in air operated.

• Cleaned for high purity semiconductor applications
• Cleanroom assembled and Helium leaked tested
• Valve meets dimensional requirements of SEMI F36-0299, Option 1
• User-friendly forged body
• M5 actuation port
• Compact and lightweight