Series SL is an ultra high purity (UHP) regulator for gas delivery in semiconductor and other clean industries. The series has a springless design (no poppet spring in the wetted area), and is available in low to intermediate flow capacities. Available options include Hastelloy® internals for corrosion resistance, a tube weld fitting connection type, and various surface finishes.

• For UHP gas delivery
• Standard flow capacity: to 30 slpm; high flow capacity: to 130 slpm
• Body material: 316L SS secondary remelt
• Hastelloy® internals available for corrosion resistance
• Sub-atmospheric pressure delivery option

Series SL is an ultra high purity (UHP) regulator for gas delivery in semiconductor and other clean industries. The series has a springless design (no poppet spring in the wetted area), and is available in low to intermediate flow capacities. Available options include Hastelloy® internals for corrosion resistance, a tube weld fitting connection type, and various surface finishes.

• For UHP gas delivery
• Flow capacity to 30 slpm
• Body material: 316L SS secondary remelt
• Hastelloy® internals available for corrosion resistance
• Sub-atmospheric pressure delivery option

Series SL is an ultra high purity (UHP) regulator for gas delivery in semiconductor and other clean industries. The series has a springless design (no poppet spring in the wetted area), and is available in low to intermediate flow capacities. Available options include Hastelloy® internals for corrosion resistance, a tube weld fitting connection type, and various surface finishes.

• For UHP gas delivery
• Body material: 316L SS secondary remelt
• Hastelloy® internals available for corrosion resistance
• Springless design (no poppet spring in the wetted area)
• Intermediate flow

Series SL is an ultra high purity (UHP) regulator for gas delivery in semiconductor and other clean industries. The series has a springless design (no poppet spring in the wetted area), and is available in low to intermediate flow capacities. Available options include Hastelloy® internals for corrosion resistance, a tube weld fitting connection type, and various surface finishes.

• For UHP gas delivery
• Body material: 316L SS secondary remelt
• Inlet pressure:  max. 3800 psig (2.1 MPa)
• Springless design (no poppet spring in the wetted area)
• Intermediate flow