1. Productos SMC
  2. Specialty Equipment
  3. Process Gas Equipment
  4. Diaphragm Valves
  5. Air Operated
  6. AP
  7. AP3130 & 3113, Diaphragm Valve, Air Operated for High Pressure and High Flow
Opciones de configuración

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AP3130 & 3113, Diaphragm Valve, Air Operated for High Pressure and High Flow


Series AP is an ultra high purity (UHP) diaphragm valve for gas delivery in semiconductor and other clean industries. The series is available in air operated and manually operated valves with  low and high pressures. Available options include Hastelloy®  C22, 316L SS secondary remelt, and the choice of normally closed or normally open indicator switch.

  • Suitable for UHP gas supply line
  • Body material: 316L SS secondary remelt
  • Pneumatically actuated normally closed
  • High pressure type: 20.7 MPa and 9 MPa
  • Designed for bulk specialty gas (BSGS) delivery
  • LOTO option available as an option
Configuration Options
  
 
Select Product Options
Seleccionar valores de las listas desplegables para configurar las referencia.
Model Configuration Status
Material Configuration Status
Surface Finish Configuration Status
Connection 1 Configuration Status
Connection 2 Configuration Status
Seat Material Configuration Status
Option Configuration Status
Opciones en:
  • Gris no son compatibles con cualquier otro valor seleccionado.
  • Rojo tienen conflictos con otro valor seleccionado.
  • Ambar no se recomiendan.

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