Series AP is an ultra high purity (UHP) diaphragm valve for gas delivery in semiconductor and other clean industries. The series is available in air operated and manually operated valves with  low and high pressures. Available options include Hastelloy®  C22, 316L SS secondary remelt, and the choice of normally closed or normally open indicator switch.

• Suitable for UHP gas line supply line
• Body material: 316L SS secondary remelt
• Pneumatically actuated normally closed or normally open
• LOTO option available as an option (AP3540)
• Indicator switch available as an option (AP3550)

Series AP is an ultra high purity (UHP) diaphragm valve for gas delivery in semiconductor and other clean industries. The series is available in air operated and manually operated valves with  low and high pressures. Available options include Hastelloy®  C22, 316L SS secondary remelt, and the choice of normally closed or normally open indicator switch.

• Suitable for UHP gas line supply line
• Body material: 316L SS secondary remelt
• Pneumatically actuated normally closed or normally open
• LOTO option available as an option (AP4540)
• Indicator switch available as an option (AP4550)

Series AP is an ultra high purity (UHP) diaphragm valve for gas delivery in semiconductor and other clean industries. The series is available in air operated and manually operated valves with  low and high pressures. Available options include Hastelloy®  C22, 316L SS secondary remelt, and the choice of normally closed or normally open indicator switch.

• Suitable for UHP gas supply line
• Body material: 316L SS secondary remelt
• Pneumatically actuated normally closed
• High pressure type: max. 3000 psig (20.7MPa)
• Options include: LOTO option and indicator switch

Series AP is an ultra high purity (UHP) diaphragm valve for gas delivery in semiconductor and other clean industries. The series is available in air operated and manually operated valves with  low and high pressures. Available options include Hastelloy®  C22, 316L SS secondary remelt, and the choice of normally closed or normally open indicator switch.

• Suitable for UHP gas supply line
• Body material: 316L SS secondary remelt
• Pneumatically actuated normally closed
• High pressure type: 20.7 MPa and 9 MPa
• Designed for bulk specialty gas (BSGS) delivery
• LOTO option available as an option

Series AP is an ultra high purity (UHP) diaphragm valve for gas delivery in semiconductor and other clean industries. The series is available in air operated and manually operated valves with  low and high pressures. Available options include Hastelloy®  C22, 316L SS secondary remelt, and the choice of normally closed or normally open indicator switch.

• Suitable for UHP gas supply line
• Body material: 316L SS secondary remelt
• Pneumatically actuated normally closed or normally open
• Purge ports and monoblock configurations available

Series AP is an ultra high purity (UHP) diaphragm valve for gas delivery in semiconductor and other clean industries. The series is available in air operated and manually operated valves with  low and high pressures. Available options include Hastelloy®  C22, 316L SS secondary remelt, and the choice of normally closed or normally open indicator switch.

• Two step mode - metered flow and full open
• Two separate actuation ports
• Soft start valve to minimize vacuum chamber pressurization turbulence
• Metered flow adjustable 
• Pneumatically actuated normally closed
• Body material: 316L SS secondary remelt

Series AP is an ultra high purity (UHP) diaphragm valve for gas delivery in semiconductor and other clean industries. The series is available in air operated and manually operated valves with  low and high pressures. Available options include Hastelloy®  C22, 316L SS secondary remelt, and the choice of normally closed or normally open indicator switch.

• Suitable for UHP gas supply line
• Body material: 316L SS secondary remelt
• All metal wetted parts
• Pneumatically actuated normally closed
• Optional indicator switch