Series AZ is an ultra high purity (UHP) regulator for gas delivery in semiconductor and other clean industries. The series is available in low to high flow capacities, with some models offering a tied-diaphragm design. Available options include Hastelloy® internals for corrosion resistance, and a tube stub weld fitting connection.

• For UHP gas delivery
• High inlet pressure type: max. 3500 psig (24.1MPa)
• Flow capacity: standard to 30 sipm; HF (option) to 120 sipm
• Body material: 316L SS
• Hastelloy® internals available for corrosion resistance
• Point of use and source cylinder applications

Series AZ is an ultra high purity (UHP) regulator for gas delivery in semiconductor and other clean industries. The series is available in low to high flow capacities, with some models offering a tied-diaphragm design. Available options include Hastelloy® internals for corrosion resistance, and a tube stub weld fitting connection.

• For UHP gas delivery
• High inlet pressure type: max. 3500 psig (24.1MPa)
• Body material: 316L SS
• Hastelloy® internals available for corrosion resistance
• Tied-diaphragm design

Series AZ is an ultra high purity (UHP) regulator for gas delivery in semiconductor and other clean industries. The series is available in low to high flow capacities, with some models offering a tied-diaphragm design. Available options include Hastelloy® internals for corrosion resistance, and a tube stub weld fitting connection.

• For UHP gas delivery
• High inlet pressure type: standard max. 2300 psig (15.9MPa); HR (option): max: 3000 psig (20.7MPa) 
• Body material: 316L SS
• Hastelloy® internals standard
• Tied-diaphragm design
• Sub-atmospheric pressure delivery option

Series AZ is an ultra high purity (UHP) regulator for gas delivery in semiconductor and other clean industries. The series is available in low to high flow capacities, with some models offering a tied-diaphragm design. Available options include Hastelloy® internals for corrosion resistance, and a tube stub weld fitting connection.

• For UHP gas delivery
• Flow capacity to 1000 slpm 
• Body material: 316L SS
• Inlet pressure:  max. 300 psig (2.1 MPa)

 

Series AZ is an ultra high purity (UHP) regulator for gas delivery in semiconductor and other clean industries. The series is available in low to high flow capacities, with some models offering a tied-diaphragm design. Available options include Hastelloy® internals for corrosion resistance, and a tube stub weld fitting connection.

• For UHP gas delivery
• High inlet pressure type: Standard max. 1700 psig (11.7 MPa); HR (option) max. 3000 psig (20.7 MPa)
• Flow capacity: standard to 800 slpm; HF (option) to 1000 slpm; FC (opton) to 1500 slpm
• Body material: 316L SS
• Hastelloy internals available for corrosion resistance
• Point of use and source cylinder applications

Series AZ is an ultra high purity (UHP) regulator for gas delivery in semiconductor and other clean industries. The series is available in low to high flow capacities, with some models offering a tied-diaphragm design. Available options include Hastelloy® internals for corrosion resistance, and a tube stub weld fitting connection.

• For UHP gas delivery
• Flow capacity to 2000 slpm 
• Body material: 316L SS
• Inlet pressure:  max. 300 psig (2.1 MPa)

 

Series AZ is an ultra high purity (UHP) regulator for gas delivery in semiconductor and other clean industries. The series is available in low to high flow capacities, with some models offering a tied-diaphragm design. Available options include Hastelloy® internals for corrosion resistance, and a tube stub weld fitting connection.

• For UHP gas delivery
• Sub-atmospheric to low positive pressure delivery
• Body material: 316L SS
• Hastelloy® internals available for corrosion resistance
• Flow capacity to 0.5 slpm